By Anonymous on Thursday, November 29, 2001 - 10:40 am:
Looking for suggestions on a GC method for chlorofluorosilanes. Specifically, pure SiF4 and pure SiClF3, with impurities of the higher order chlorosilanes up to SiCl4 and CO2. I am using a DID with foreflush, heartcut/backflush valving. Biggest challenge is trace CO2 in SiF4. Any good column ideas?
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