Looking for suggestions on a GC method for chlorofluorosilanes. Specifically, pure SiF4 and pure SiClF3, with impurities of the higher order chlorosilanes up to SiCl4 and CO2. I am using a DID with foreflush, heartcut/backflush valving. Biggest challenge is trace CO2 in SiF4. Any good column ideas?
Posting is currently disabled in this topic. Contact your discussion moderator for more information.