Any suggested GC methods for the chlorofluorosilanes? Looking at matrices of pure SiF4 and Pure SiClF3, with impurities of the higher order chlorosilanes up to SiCl4. I have the GC, detector and foreflush/heartcut/backflush valving. Biggest challenge is trace CO2 in SiF4. Any good column ideas?

Porous polymer beads and tenax have been common cures. Just make sure that the polymers are externally and internally clean and reactive sites are blocked via silylation first.